The paper studies on low-pressure water jet assisted laser processing, and etches Al2O3 ceramics by using this method. A comprehensive study on the influence of laser processing parameters on surface quality of an Al2O3 ceramic sheet is presented. The surface quality of normal laser processing and low-pressure water jet assisted laser processing were comparative analyzed using a 3-D microscopy. Experiments proved that, the composite processing of low-pressure water jet assisted laser processing can obtain good surface quality, and lessen molten slags and thermal deformation , compared with the normal laser processing.