Chinese Journal of Lasers, Volume. 21, Issue 6, 457(1994)
Analyses of the structure and Interfaces of Multilayer UsingHigh-resolution Transmission Electron Microscopy
The structure of a Mo/Si multilayer fabricated with planiar magnetron sputtering has been inveStigated by using SAXD and HRTEM techniques. The FC-digital image processing syStem, which can easily give us the digital results of the structure parameters of multilayer, has been induced in analyses of HRTEM.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analyses of the structure and Interfaces of Multilayer UsingHigh-resolution Transmission Electron Microscopy[J]. Chinese Journal of Lasers, 1994, 21(6): 457
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