Using di-ethoxy-silicane as precursor，a colloidal prepolymer was developed from sol-gel process. With silica colloid as modifier，the modified moisture-resistant films were prepared on neodymium-doped phosphate glass by spin coating. When the mole ratio of di-ethoxy-silicane to silica was 1: 1，the films after cure had improved abrasion-resistance. RMS was 1. 245 nm，while laser-damage threshold value more than 15 J / cm2 at the condition of 1 053 nm，1 ns. After staying in a closed circumstance at 80 ℃ and 95%RH，the films had approximately constant transmission and contact angle. It indicates that the films have a stable hydrophobic structure，good moisture-resistance，improved abrasion-resistant feature and longer service life.