This paper describes a new multi-layer complex liquid-cooled Si mirror with 3 cooling ducts in Archimedes spirals. Utilizing the ANSYS program, the structure of the mirror is optimized and the thermal deformation model of the mirror is simulated. The simulation results show that the mirror has the following advantages: very small amount of surface deformation, uniform distribution of temperature and surface deformation, and fast surface shape restoration. The results of the experiments of thermal deformation and the surface restoration are accurately mapped to the simulation results.