Ultraviolet(UV) laser with its short wavelength, high machining accuracy and cold processing property, has unique ad-vantages in micromachining, and can effectively improve the manufacturing quality. Modern electronic industry has achieved a rapid development in recent years, and sets higher demands in fabricating. UV laser’s progress and applica-tions in electronic industry attracts are attracting broad attention. UV laser can process complex structures on almost any materials with flexible process and small heat-affected zone. It summarizes the development of UV laser. The fundamental principles and characteristics of excimer laser and diode pumped solid state laser are given, which are two major UV lasers used for micromachining. The development and applications of UV laser in the micromachining of semiconductor, optical element and polymer are introduced. It gives some prospects and forecasts about research in the further development.