Chinese Optics, Volume. 16, Issue 1, 94(2023)
Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor
The diffraction effect of microlens array will affect the detection accuracy of Shack-Hartmann wavefront sensor. Based on Huygens-Fresnel diffraction theory, a two-dimensional microlens array diffraction model is established to simulate and analyze the two-dimensional diffraction spot array generated in the focal plane when the ideal parallel light is incident on the microlens array. First, the maximum centroid calculation error is determined by calculating the centroid error in the process of diffraction spot shifting by one pixel. Then the wavefront is reconstructed by using the modal method to obtain the wavefront detection error. The simulation results show that the maximum wavefront error caused by diffraction is 0.125 λ at 0.21 and 0.79 pixels offset, that is, when the wavefront deflection is 0.03° and 0.13°. Finally, an experiment is performed to verify the effectiveness of the error calculation method. This work provides a theoretical basis for the design of shack-Hartmann wavefront detector.
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Qin-yu ZHU, Mei-rui CHEN, Huan-jun LU, Li-na FAN, Jian-tao PENG, Hui-juan SUN, Guo-ding XU, Hong-min MAO, Zhao-liang CAO. Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor[J]. Chinese Optics, 2023, 16(1): 94
Category: Original Article
Received: Aug. 5, 2022
Accepted: --
Published Online: Jul. 5, 2023
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