Chinese Optics, Volume. 16, Issue 1, 94(2023)

Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor

Qin-yu ZHU1,2, Mei-rui CHEN1,2, Huan-jun LU1,2, Li-na FAN1,2, Jian-tao PENG3, Hui-juan SUN4, Guo-ding XU1,2, Hong-min MAO1,2、*, and Zhao-liang CAO1,2、*
Author Affiliations
  • 1Suzhou University of Science and Technology, School of Physical Science and Technology, Suzhou 215009, China
  • 2Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application, Suzhou 215009, China
  • 3Shanghai Institute of Satellite Engineering, China Aerospace Science and Technology Corporation, Shanghai 201109, China
  • 4Institute of Mathematics and Physics, Beijing Union University, Beijing 100101, China
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    The diffraction effect of microlens array will affect the detection accuracy of Shack-Hartmann wavefront sensor. Based on Huygens-Fresnel diffraction theory, a two-dimensional microlens array diffraction model is established to simulate and analyze the two-dimensional diffraction spot array generated in the focal plane when the ideal parallel light is incident on the microlens array. First, the maximum centroid calculation error is determined by calculating the centroid error in the process of diffraction spot shifting by one pixel. Then the wavefront is reconstructed by using the modal method to obtain the wavefront detection error. The simulation results show that the maximum wavefront error caused by diffraction is 0.125 λ at 0.21 and 0.79 pixels offset, that is, when the wavefront deflection is 0.03° and 0.13°. Finally, an experiment is performed to verify the effectiveness of the error calculation method. This work provides a theoretical basis for the design of shack-Hartmann wavefront detector.

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    Qin-yu ZHU, Mei-rui CHEN, Huan-jun LU, Li-na FAN, Jian-tao PENG, Hui-juan SUN, Guo-ding XU, Hong-min MAO, Zhao-liang CAO. Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor[J]. Chinese Optics, 2023, 16(1): 94

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    Paper Information

    Category: Original Article

    Received: Aug. 5, 2022

    Accepted: --

    Published Online: Jul. 5, 2023

    The Author Email:

    DOI:10.37188/CO.2022-0176

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