Polarization dependent of laser-induced nanostructures is an effective technique to realize nano-pattering and has been favored by researchers.The polarization-dependent characteristics of laser-induced nanostructures on 6H-SiC crystal surface are investigated by the method of femtosecond laser micromachining.The spherical nanoparticles with a diameter of about 150 nm,the elliptical nanoparticles and the periodic ripple structures with the period of 150 nm have been fabricated on sample surface by controlling the laser machining parameters of polarizations and time delays.The results show that the polarization properties of incident laser directly affect the induced microstructure morphologies,and the femtosecond laser with preferential incident plays a decisive role in the final surface micro-nano structures.The physical mechanism of polarization-dependent formation of laser-induced nanostructures is preliminarily discussed,the surface plasmon polariton (SPP) plays an important role in the generation of surface micro-nano structures,and the research results are of great significance for the controllable fabrication of laser-induced periodic surface structures (LIPSS).