Optoelectronic Technology, Volume. 43, Issue 1, 7(2023)

Design and Fabrication of LNOI Based High-speed Electro-optic Switch

Jie TANG1,2,3, Ziyan WANG4, Kun QIAN4, Xiaozhou HE4, Shilong PAN3, Chenquan WANG1,2, Xiaowen GU1,2, Guang QIAN1,2, Yuechan KONG1,2, and Tangsheng CHEN1,2
Author Affiliations
  • 1Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing 2006, CHN
  • 2Nanjing Electronic Devices Institute, Nanjing 10016,CHN
  • 3College of Electronic and Information Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 211106, CHN
  • 4The Shanghai Bureau of Air Force Equipment Department, Shanghai 200231,CHN
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    An electro-optic switch was developed based on the lithium niobate on insulator (LNOI) platform. The structure of the LNOI waveguide, multimode interferometer (MMI) coupler and metal electrodes were carefully designed. The fabricated electro-optic switch chip was coupled with optical fiber arrays and packaged by using metal shell. The measured on-off switch time was less than 13.4 ns and the extinction ratio was about 31.8 dB. The results showed that LNOI based electro-optic switch was an excellent candidate for developing high performance integrated optical beamforming network chips used in microwave photonic radars.

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    Jie TANG, Ziyan WANG, Kun QIAN, Xiaozhou HE, Shilong PAN, Chenquan WANG, Xiaowen GU, Guang QIAN, Yuechan KONG, Tangsheng CHEN. Design and Fabrication of LNOI Based High-speed Electro-optic Switch[J]. Optoelectronic Technology, 2023, 43(1): 7

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    Paper Information

    Category: Research and Trial-manufacture

    Received: Oct. 14, 2022

    Accepted: --

    Published Online: Apr. 14, 2023

    The Author Email:

    DOI:10.19453/j.cnki.1005-488x.2023.01.002

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