Chinese Journal of Lasers, Volume. 41, Issue 4, 408004(2014)
Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System
As a super-precision and un-touched measuring system, dual-frequency laser interferometers with the advantages of high accuracy, large-scale and high measurement speed plays an important role in many fields. It is well known that environments such as temperature, air pressure and humidity play the most influence on measurement precision of dual-frequency laser interferometer. In order to improve precision, environments must be controlled and compensated. The environment compensation technologies are described and a novel wavelength tracker is developed. The test results contrasted with Edlen show that the novel wavelength tracker has good effects on environmental compensation. Moreover, the servo controlling precision of moving stage measured by dual-frequency interferometer compensated with the novel wavelength tracker is 1.61 nm.
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Chi Feng, Zhu Yu, Zhang Zhiping, Gao Weigong. Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System[J]. Chinese Journal of Lasers, 2014, 41(4): 408004
Category: measurement and metrology
Received: Aug. 7, 2013
Accepted: --
Published Online: Mar. 14, 2014
The Author Email: Feng Chi (chif@smee.com.cn)