Chinese Journal of Lasers, Volume. 41, Issue 4, 408004(2014)

Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System

Chi Feng1、*, Zhu Yu1, Zhang Zhiping2, and Gao Weigong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    As a super-precision and un-touched measuring system, dual-frequency laser interferometers with the advantages of high accuracy, large-scale and high measurement speed plays an important role in many fields. It is well known that environments such as temperature, air pressure and humidity play the most influence on measurement precision of dual-frequency laser interferometer. In order to improve precision, environments must be controlled and compensated. The environment compensation technologies are described and a novel wavelength tracker is developed. The test results contrasted with Edlen show that the novel wavelength tracker has good effects on environmental compensation. Moreover, the servo controlling precision of moving stage measured by dual-frequency interferometer compensated with the novel wavelength tracker is 1.61 nm.

    Tools

    Get Citation

    Copy Citation Text

    Chi Feng, Zhu Yu, Zhang Zhiping, Gao Weigong. Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System[J]. Chinese Journal of Lasers, 2014, 41(4): 408004

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: measurement and metrology

    Received: Aug. 7, 2013

    Accepted: --

    Published Online: Mar. 14, 2014

    The Author Email: Feng Chi (chif@smee.com.cn)

    DOI:10.3788/cjl201441.0408004

    Topics