Chinese Journal of Lasers, Volume. 29, Issue s1, 568(2002)
Design for Optical System and Beam Control of Laser Trimmer
The design for optical system of laser trimmer is mainly discussed. The effect of parameters and scanning manner of laser beam on the trimming is analysed in detail. In addition, according to the general needs of the machine, the accurate control of scanning galvanometer and laser source is presented.
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ZHAO Xin, YAO Jian-quan, LIANG Li-ping. Design for Optical System and Beam Control of Laser Trimmer[J]. Chinese Journal of Lasers, 2002, 29(s1): 568
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Category: laser devices and laser physics
Received: --
Accepted: --
Published Online: Feb. 23, 2013
The Author Email:
CSTR:32186.14.
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