Chinese Journal of Lasers, Volume. 22, Issue 3, 199(1995)
Preionization near Anode Improves Homgenity of Discharge in an Excimer Laser
The preionization near anode was suggestted in stead of preionization near cathode and experiments show that preionization near anode has improved both discharge homogenity and pulse energy output.
Keywords
Tools
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preionization near Anode Improves Homgenity of Discharge in an Excimer Laser[J]. Chinese Journal of Lasers, 1995, 22(3): 199
Paper Information
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20