Acta Optica Sinica, Volume. 8, Issue 10, 928(1988)
A submicron lithographic lens available to 1:1 stepper
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WANG ZHIJIANG, SUN BAODING, Lu DENGWU, JIANG JIANZHONG. A submicron lithographic lens available to 1:1 stepper[J]. Acta Optica Sinica, 1988, 8(10): 928
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Dec. 28, 1987
Accepted: --
Published Online: Sep. 16, 2011
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CSTR:32186.14.
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