Journal of Synthetic Crystals, Volume. 50, Issue 2, 361(2021)

Design of Follow-Up Heater for Czochralski Single Crystal Furnace

ZHANG Xiya1、*, GAO Dedong1, WANG Shan1, GUO Bing1, and SONG Shenghong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less

    Single crystal furnace is a kind of equipment which uses graphite thermal field to melt polysilicon materials in the inert gas environment dominated by high-purity argon, and grows single crystal silicon by Czochralski method. In the process of solar single crystal silicon drawing, how to improve the speed and quality of drawing crystals and reduce the energy consumption of equipment has always been the eternal pursuit of single crystal silicon manufacturers. From the perspective of mechanical structure, this paper analyzes the decrease of crystal drawing speed and extra energy consumption caused by rising crucible in single crystal furnace. On the basis of this problem, a method for optimizing the structure of single crystal furnace with crucible rising in the process of crystal drawing was proposed, and through the finite element simulation, the thermal field of the crystal and the melt before and after the optimization of the single crystal furnace and the heater power during the crystal drawing process were analyzed. The simulation analysis shows that the optimizing single crystal furnace can not only improve the stability and speed of crystal drawing process, so as to further improve the quality and output of single crystal furnace, but can also effectively reduce the energy consumption of single crystal furnace.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Xiya, GAO Dedong, WANG Shan, GUO Bing, SONG Shenghong. Design of Follow-Up Heater for Czochralski Single Crystal Furnace[J]. Journal of Synthetic Crystals, 2021, 50(2): 361

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 25, 2020

    Accepted: --

    Published Online: Mar. 30, 2021

    The Author Email: Xiya ZHANG (527876972@qq.com)

    DOI:

    CSTR:32186.14.

    Topics