In high-power laser, as a kind of contamination on the surface of fused silica, the metal particles has been long concerned. In order to measure the influence of metal particles on damage threshold of fused silica quantitatively, damage threshold of uncontaminated and contaminated (by Al, Cu, Fe) Corning7980 fused silica is tested on the standard damage test platform in Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. Research finds that, the damage threshold of contaminated fused silica is reduced to 20%~30% compared to the uncontaminated, the higher-absorption-coefficient metal particles induce damage more easily, and damage morphology is very different. The uncertain behavior and probability of damage is offline observed from microscopics point of view. Refer to the damage explosion model, the temperature changes over time is roughly simulated.