To improve the post positional accuracy of aircraft, a processing method based on the tracking data fusion of multi radar photoelectric theodolites was presented. The math model of the tracking data of radar photoelectric theodolite was put forward, the spline restraint method was applied to the fusion processing of angle, range and velocity measurement data, and the joint model of positional parameters of aircraft and systematic errors of devices was established, whose redundancy was improved by using radar measurement data. The corresponding simulation results show that, compared with the fusion method of only angle measurement data, the estimation accuracy of positional parameters and system errors are improved significantly by the fusion method of angle, range and velocity measurement data.