A comparator delay-compensated relaxation oscillator was designed by clamping the peak voltage during the capacitor charging phase to a set reference voltage to mitigate the effects of comparator delay. The circuit and layout were implemented using the SMIC 0.18 μm process. Post-simulation results showed an oscillator output frequency of 640 kHz, with a temperature variation rate of ±0.27% across a temperature range of −40 to 125 °C and power supply sensitivity of ±0.48%/V within a voltage range of 2.5–3.3 V.