The Journal of Light Scattering, Volume. 37, Issue 2, 172(2025)
Fiber-Optic Probe with Time-Correlated Raman Spectroscopy
Time-correlated Raman spectroscopy is crucial for in-situ thermometry of semiconductor materials. Industrial applications often require compact and portable time-correlated Raman spectroscopy detection equipment. The time-correlated Raman spectroscopy equipment with compact configuration and miniaturization is valuable for real-time online monitoring of industrial production. A lightweight fiber-optic probe with time-correlated Raman spectroscopy is designed for time-correlated Raman detection, steady-state non-contact in-situ thermometry, and time-correlated non-contact in-situ thermometry. A time-correlated Raman spectroscopy detection system was constructed based on this probe. The dependence of Raman spectrum characteristics of intrinsic Si wafer on temperature in the steady-state temperature range of 21.6~435.0 ℃ was investigated under non-contact conditions. By establishing the synchronous time relationship between the probe and the heating platform, the in-situ temperature of the intrinsic Si wafer under the periodic temperature change of 77.3~91.5 ℃ was successfully measured under non-contact conditions. Fiber-optic Probe with time-correlated Raman spectroscopy has potential for applications in the fields of non-contact in-situ thermometry, characterization of materials, and monitoring of chemical reaction processes.
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TAN Aodi, CHEN Na, SHANG Yana, LIU Shupeng, LIU Yong, PANG Fufei, WANG Tingyun. Fiber-Optic Probe with Time-Correlated Raman Spectroscopy[J]. The Journal of Light Scattering, 2025, 37(2): 172
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Received: Sep. 12, 2024
Accepted: Jul. 31, 2025
Published Online: Jul. 31, 2025
The Author Email: CHEN Na (na.chen@shu.edu.cn)