Chinese Journal of Lasers, Volume. 18, Issue 6, 455(1991)
Holographic lens array and elliptical zone plate fabricated by deep UV lithography zone plate
Holographic lens arrays and elliptical zone plates are fabricated on holographic plate and photoresist by using interference of the 1st order diffraction and the 2nd order diffraction beams from ion etching Fresnel zone plate obtained by electronic beam scanning and deep ultraviolet lithography techniques. The experimental results of focusing and images produced are given.
Keywords
Tools
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese]. Holographic lens array and elliptical zone plate fabricated by deep UV lithography zone plate[J]. Chinese Journal of Lasers, 1991, 18(6): 455
Paper Information
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20