Optics and Precision Engineering, Volume. 20, Issue 7, 1469(2012)

Application of optical coherence tomography to distance measurement of optical surface

WANG Zhi-bin1,2、*, SHI Guo-hua1, HE Yi2, DING Zhi-hua3, and ZHANG Yu-dong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    A measuring system based on optical coherence tomography was established to measure the distance of optical surfaces non-contactly. The system was developed by modifying the sample scanning device based on a time-domain optical coherence tomographic system. The tomographic images of optical surfaces in different depths were acquired by moving the fiber collimator in sample arm through a high precision guide. The distance of an air gap sample and a lens were measured by using this system. Results show that the measured value of air gap sample is 6.026 mm while it is 6.02 mm by using a vernier caliper. Furthermore, the measured value of air gap in the lens is 10.750 mm while its design value is (10.7±0.03) mm.The systematic error is 3.871 μm and the sensitivity is 10.5 μm. The measurement method is characterized by non-contact, high precision, and high sensitivity, and has great potential in optical material testing.

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    WANG Zhi-bin, SHI Guo-hua, HE Yi, DING Zhi-hua, ZHANG Yu-dong. Application of optical coherence tomography to distance measurement of optical surface[J]. Optics and Precision Engineering, 2012, 20(7): 1469

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    Paper Information

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    Received: Dec. 23, 2011

    Accepted: --

    Published Online: Aug. 9, 2012

    The Author Email: WANG Zhi-bin (zbwang16@gmail.com)

    DOI:10.3788/ope.20122007.1469

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