Piezoelectrics & Acoustooptics, Volume. 46, Issue 2, 273(2024)
Piezoelectric Micro-Motion Platform Based on Hydraulic Amplification
In response to the difficulty of traditional micro-motion platforms in meeting the requirements of micro/nano positioning, a two degree-of-freedom piezoelectric micro-motion platform based on hydraulic amplification is proposed and its structural design is created. The orthogonal design method was used to analyze the bidirectional fluid-structure coupling and optimize its structural parameters. A physical prototype was developed and experimental research was conducted. The open-loop experimental results show that when a 90 μm displacement is input into the piezoelectric actuator, the maximum displacement of the piezoelectric micro-motion platform is 603.0 μm, and the magnification is approximately 6.7. The closed-loop control experimental results show that using a segmented PID algorithm can reduce the overshoot, shorten the response and steady-state times, and reduce the steady-state error to ±0.2 μm. Thus, the micro-motion platform can realize precise large-scale positioning.
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XU Youxiong, ZHUANG Guangfeng, CHEN Xingyu, LI Gongle. Piezoelectric Micro-Motion Platform Based on Hydraulic Amplification[J]. Piezoelectrics & Acoustooptics, 2024, 46(2): 273
Received: Nov. 17, 2023
Accepted: --
Published Online: Aug. 29, 2024
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