Chinese Journal of Lasers, Volume. 29, Issue s1, 575(2002)
Study on Precision Machining Ceramics and Glass by Excimer Laser
In this paper, the process studying of precision machining ceramics tile and glass tile with KrF (λ= 248 nm) excimer laser were carried out, the effects of processing parameters on quality of precision machining were studied. The effect of laser parameters on surface roughness of workpieces were studied too. The surface topography of machined workpiece was analyzed.
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JIANG Chao, HU Shao-liu, WANG You-qing, LI Bo, LONG Hua, Ao Yu-hong. Study on Precision Machining Ceramics and Glass by Excimer Laser[J]. Chinese Journal of Lasers, 2002, 29(s1): 575
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Category: laser devices and laser physics
Received: --
Accepted: --
Published Online: Feb. 23, 2013
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CSTR:32186.14.
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