An improved approach of large area thin film deposition by a hybrid scanning laser ablation is proposed, in which the pulsed laser radiates a target along a specially designed track just like moon circling round sun. The calculation results show that the thickness distribution of films is more homogeneous than that with the simple circle scanning ablation, and an optimum dependence of film thickness homogeneity on such parameters as scanning track, and scanning speed etc. is presented. The tentative experimental study indicates the effectiveness of this method.