Collection Of theses on high power laser and plasma physics, Volume. 10, Issue 1, 1393(2012)

Integrated interferometer for monitoring three-dimensional vibrations by discrete aperture

Xuejie Zhang*, Wei Huang, Dean Liu, Tao Feng, Yan Zhang, Pingping Sun, and Jianqiang Zhu
Author Affiliations
  • Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box
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    This paper presents a new method for measuring vibration based on interference from twospherical waves. By integrating the two interference arms into a beamsplitter cube by reflectivefilm and dividing the probe beam into two parts with discrete apertures, the interferometer candistinguish that the vibrations are from the monitored optical components or from laser interferometer systemitself. At the same time, because the two interference waves are spherical, it can realize monitoringthe three-dimensional vibrations. The measurement system has advantages of being stable andreliable with an integrated structure. Theoretical analysis and experimental demonstration are performed.The experiment results indicate that the method can monitor three-dimensional vibrationsaccurately.

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    Xuejie Zhang, Wei Huang, Dean Liu, Tao Feng, Yan Zhang, Pingping Sun, Jianqiang Zhu. Integrated interferometer for monitoring three-dimensional vibrations by discrete aperture[J]. Collection Of theses on high power laser and plasma physics, 2012, 10(1): 1393

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    Paper Information

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    Received: Jun. 7, 2011

    Accepted: --

    Published Online: Jun. 2, 2017

    The Author Email: Zhang Xuejie (sddxzxj@126.com)

    DOI:10.1016/j.optlastec.2011.12.027

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