In view of the fact that the attitude measurement of the air bearing table is an important basis for the control of the air bearing table, in order to realize the accurate and fast attitude measurement of the Three-axis air bearing table, a real-time and high-precision attitude measurement method based on monocular vision is proposed. A robust target shape and layout method is adopted to improve the attitude acquisition accuracy. A process of fitting the center of a circle is proposed, and the target can be tracked in real time and robustly through rough acquisition and accurate acquisition methods. Finally, the position and attitude information of the air bearing table is calculated by using the iterative least square attitude estimation algorithm. The experimental results show thatthe real-time frame of the monocular vision measurement algorithm can reach up to 20 frames, and the attitude measurement accuracy is about 0.02 degrees under static conditions, 0.12 degrees under dynamic conditions and can meet the real-time, accuracy and robustness requirements of the air bearing table for attitude measurement.