Chinese Journal of Lasers, Volume. 12, Issue 8, 492(1985)
Measurement of local solid temperature by laser Raman spectroscopy
Local temperature of solid surface can be obtained by the intonsity ratio between Stokes Bumnn scattering and anti-Stokcs Banian scattering from samples. It is a real time temperature measurement without touching the object. It needs no calibration, but derives from spectroscopic measurement. It meets the requirements of surface physics and new technology development of VLSI. A steady state measurement using a low power laser has been achieved. The analysis and correction of its errors are given.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of local solid temperature by laser Raman spectroscopy[J]. Chinese Journal of Lasers, 1985, 12(8): 492
Category: laser devices and laser physics
Received: Aug. 15, 1984
Accepted: --
Published Online: Nov. 6, 2012
The Author Email:
CSTR:32186.14.