Chinese Journal of Lasers, Volume. 12, Issue 8, 492(1985)

Measurement of local solid temperature by laser Raman spectroscopy

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    Local temperature of solid surface can be obtained by the intonsity ratio between Stokes Bumnn scattering and anti-Stokcs Banian scattering from samples. It is a real time temperature measurement without touching the object. It needs no calibration, but derives from spectroscopic measurement. It meets the requirements of surface physics and new technology development of VLSI. A steady state measurement using a low power laser has been achieved. The analysis and correction of its errors are given.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of local solid temperature by laser Raman spectroscopy[J]. Chinese Journal of Lasers, 1985, 12(8): 492

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    Paper Information

    Category: laser devices and laser physics

    Received: Aug. 15, 1984

    Accepted: --

    Published Online: Nov. 6, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

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