To meet the design and usage requirements of the precision light beam scanner, the thermoelastic distortion of prism is detailedly analyzed by the thermal-structure coupling method, the influence of which, on the surface deformations of prism, is conclusively proved far greater than that of only the gravity load without temperature fluctuation. With the temperature fluctuation from 20 to 20.5 Celsius degrees, the strains as well as the stresses appropriately eightfold increase, which right accords with the actual results measured by Zygo Mark interferometer with the error of not over 10%. Therefore some strict temperature-controlled measures are necessary for the scanner.