ZrO₂ sol was prepared by controlling hydrolysis ZrOCl₂·8H₂O in heated alcoholic solution. The thin films were deposited by dip technique. The characterization of ZrO₂ sol was analyzed by viscosity, particle size analyzer, IR, DSC and AFM analysis. The results showed that the average size of sol particles was 18.9 nm; the refractive index of coatings treated at 300℃ was 1.95; the morphology of coatings surface was smooth, and its average roughness was only 0.561 nm. The laser induced damage threshold of ZrO₂ coating was 14 J/cm2(1064 nm, 1 ns)