Piezoelectrics & Acoustooptics, Volume. 46, Issue 5, 638(2024)

Gear Fault Detection System Based on MEMS Acoustic Emission Sensor

ZHANG Jixuan1, DOU Hanjie1, LIU Tao1, LI Zhihao1, YANG Xiao1, ZHANG Mingyang2, MAO Yuchen1, and MU Xiaojing1
Author Affiliations
  • 1Key Laboratory of Optoelectronic Technology & Systems of Ministry of Education, Chongqing University, Chongqing 400044, China
  • 2The 24th Institute of China Electronic Technology Group Corporation, Chongqing 400060, China
  • show less

    Acoustic emission sensors are widely used in real-time health detection of equipment. The traditional piezoelectric ceramic transducers have the problems of large volume, high energy consumption, difficult integration and high cost. In this paper, a hexagonal piezoelectric film acoustic emission sensor based on ScAlN is designed. The volume is Ø18 mm×6 mm. The sensitivity of surface wave and longitudinal wave is higher than 60 dB[Ref.V/(m/s)]in the bandwidth of 40-500 kHz. After the design and packaging of the matching layer, the gear fault detection system is built, which can effectively distinguish the normal gear and the broken tooth signal. The test results show that the piezoelectric film acoustic emission sensor based on Micro-Electro-Mechanical Systems (MEMS) has both high sensitivity and miniaturization, and has high reliability and accuracy in gear fault diagnosis.

    Tools

    Get Citation

    Copy Citation Text

    ZHANG Jixuan, DOU Hanjie, LIU Tao, LI Zhihao, YANG Xiao, ZHANG Mingyang, MAO Yuchen, MU Xiaojing. Gear Fault Detection System Based on MEMS Acoustic Emission Sensor[J]. Piezoelectrics & Acoustooptics, 2024, 46(5): 638

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Oct. 12, 2024

    Accepted: Jan. 17, 2025

    Published Online: Jan. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.05.003

    Topics