High Speed Optical Scanning System Based on MEMS

Zhong Yihui; Gong Qiang; Zhu Tianfeng

doi:10.14128/j.cnki.al.20214102.391

APPLIED LASER, Volume. 41, Issue 2, 391(2021)

High Speed Optical Scanning System Based on MEMS

Zhong Yihui^*, Gong Qiang, and Zhu Tianfeng

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[in Chinese]

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A high-speed lidar is designed for real-time imaging. This lidar system consists of collimated laser diode,One-dimension MEMS microscanner,Reflector, driving motor and photodetector,in which MEMS is the core device. The MEMS lidar system owns characteristics of high accuracy,low price,high-speed,three dimension and real time imaging.

Keywords

1 d mems mirror high-speed lidar microscanning

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Zhong Yihui, Gong Qiang, Zhu Tianfeng. High Speed Optical Scanning System Based on MEMS[J]. APPLIED LASER, 2021, 41(2): 391

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