Chinese Journal of Lasers, Volume. 42, Issue 1, 107002(2015)

Mid-Infrared Properties of Oxide Coatings Prepared by Ion Beam Sputtering Deposition

Li Ding1,2、* and Xiong Shengming1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Single layer Al2O3,Nb2O5 films are prepared by ion beam sputtering deposition (IBSD). Optical constants are measured by infrared variable angle spectroscopic ellipsometer (IR- VASE). Surface topography and roughness of these films are investigated by atomic force microscopy (AFM). 2.7 μm dielectric mirror is prepared using Nb2O5 and Al2O3 as high and low refractive index materials. The environmental stability of single layer films is tested. The results show that asdeposited films have relatively high refractive index, low extinction coefficient, excellent surface morphology and extremely low scattering loss. There is no water absorption in these films which can lead to great increase in extinction coefficient at the 2.7 μm band. The measured reflectance of 2.7 μm Nb2O5/Al2O3 mirror is 99.63% , close to theoretical value. All the films have passed the environmental tests,showing that oxide coatings fabricated by IBSD are stable and durable in hash environment.

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    Li Ding, Xiong Shengming. Mid-Infrared Properties of Oxide Coatings Prepared by Ion Beam Sputtering Deposition[J]. Chinese Journal of Lasers, 2015, 42(1): 107002

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    Paper Information

    Category: materials and thin films

    Received: Aug. 15, 2014

    Accepted: --

    Published Online: Dec. 11, 2014

    The Author Email: Ding Li (dingfengju321@126.com)

    DOI:10.3788/cjl201542.0107002

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