Journal of Synthetic Crystals, Volume. 50, Issue 6, 1096(2021)
Effect of the Compound Surfactant of Sodium Dodecylbenzene Sulfonate and Polyvinylpyrrolidone on the Surface Texturing of Monocrystalline Silicon
In this paper, a compound solution of sodium dodecylbenzene sulfonate (SDBS) and polyvinylpyrrolidone (PVP) was used as a texturing additive to replace the isopropyl alcohol (IPA) commonly used at in monocrystalline silicon texturing process. It not only reduces the reflectivity of the texturing surface and shortens the time for texturing, but also has the characteristics of low cost and no need for regular supplementation during the texturing process. The ratio, concentration, reaction time, and reaction temperature of SDBS and PVP compound additives on the effect of monocrystalline silicon texturing were investigated. The average reflectance in the wavelength range of 400 nm to 1 000 nm is 9.8% when monocrystalline silicon is textured with the mixing volume ratio of SDBS and PVP of 1∶4, the concentration of compound additives of 0.26%(mass fraction), the texturing temperature of 80 ℃, and the texturing time of 15 min. Compared with the traditional alkali alcohol texturing liquid, this compound additive not only reduces the reflectivity of the texturing surface by about 2% and shortens the texturing time by 25 min, but also has the advantages of low cost and no need to replenish the texturing liquid regularly during the texturing process.At the same time, based on the unique solubilizing and dispersing properties of surfactants, it can effectively improve the cleanliness of the silicon wafer surface. The article also found that by controlling the ratio of PVP and SDBS, the size of the texture can be changed to a certain extent. Therefore, the compound surfactant is a kind of industrial monocrystalline silicon texturing additive with great development potential.
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ZHANG Jiahua, KANG Qiao, HUANG Shihua. Effect of the Compound Surfactant of Sodium Dodecylbenzene Sulfonate and Polyvinylpyrrolidone on the Surface Texturing of Monocrystalline Silicon[J]. Journal of Synthetic Crystals, 2021, 50(6): 1096
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Received: Feb. 18, 2021
Accepted: --
Published Online: Aug. 23, 2021
The Author Email: ZHANG Jiahua (705220061@qq.com)
CSTR:32186.14.