[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 8, Issue 3, 50(1981)

[in Chinese]

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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The experimental research on spectral tuning of ArF excimer laser is reported. Frequency tuning for the UV-preionized discharge ArF excimer laser has been performed by using a simple two-prism arrangement.The tunable range is 1926 A~1944A, and the linewidth is about 0.9 A.

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. [J]. Chinese Journal of Lasers, 1981, 8(3): 50

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