Laser & Optoelectronics Progress, Volume. 58, Issue 5, 0500005(2021)
Research Progress of Femtosecond Laser Fabrication of Microlens Array
As a significant micro-optical element, microlens arrays are widely used in optical communication, optical signal processing, wavefront sensing, optical field regulation, data storage, medical diagnosis, and other fields owing to their good imaging performance and miniaturization and lightening advantages. Femtosecond laser processing technology exhibits high controllability, good flexibility, no masking requirement, and high processing accuracy, and it has recently become an important processing method for microlens arrays. Herein, the research progress of femtosecond laser processing methods for microlens arrays, including two-photon polymerization and chemical-etching-assisted ablation, were summarized. Additionally, the application of microlens arrays was introduced, and the problems and development trends pertaining to the femtosecond laser processing method for microlens arrays were analyzed.
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Xue Yang, Huilai Sun, Duanmu Yue, Jianlin Sun. Research Progress of Femtosecond Laser Fabrication of Microlens Array[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0500005
Category: Reviews
Received: Jun. 8, 2020
Accepted: Jul. 21, 2020
Published Online: Apr. 17, 2021
The Author Email: Huilai Sun (1446869177@qq.com)