Laser & Optoelectronics Progress, Volume. 58, Issue 5, 0500005(2021)

Research Progress of Femtosecond Laser Fabrication of Microlens Array

Xue Yang, Huilai Sun*, Duanmu Yue, and Jianlin Sun
Author Affiliations
  • School of Mechanical Engineering, Tiangong University, Tianjin 300387, China
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    As a significant micro-optical element, microlens arrays are widely used in optical communication, optical signal processing, wavefront sensing, optical field regulation, data storage, medical diagnosis, and other fields owing to their good imaging performance and miniaturization and lightening advantages. Femtosecond laser processing technology exhibits high controllability, good flexibility, no masking requirement, and high processing accuracy, and it has recently become an important processing method for microlens arrays. Herein, the research progress of femtosecond laser processing methods for microlens arrays, including two-photon polymerization and chemical-etching-assisted ablation, were summarized. Additionally, the application of microlens arrays was introduced, and the problems and development trends pertaining to the femtosecond laser processing method for microlens arrays were analyzed.

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    Xue Yang, Huilai Sun, Duanmu Yue, Jianlin Sun. Research Progress of Femtosecond Laser Fabrication of Microlens Array[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0500005

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    Paper Information

    Category: Reviews

    Received: Jun. 8, 2020

    Accepted: Jul. 21, 2020

    Published Online: Apr. 17, 2021

    The Author Email: Huilai Sun (1446869177@qq.com)

    DOI:10.3788/LOP202158.0500005

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