Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 976(2022)

Research on an In-Plane Bending Mode Traveling Wave Linear Ultrasonic Motor

YANG Jinbo and HE Qing
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  • [in Chinese]
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    This paper proposes a new type of circular ring traveling wave linear ultrasonic motor with incomplete teeth. The motor’s movable slider is pressed against the end face of the tooth structure on the outer surface of the circular ring vibrator under a certain pre-pressure, four piezoelectric ceramic plates are evenly distributed at 90° intervals on the inner side of the circular structure, and four sets of driving teeth are arranged at 45° intervals from the position of the piezoelectric ceramic plates. When the motor is in operation, only one driving tooth works, and the service life of the ultrasonic motor can be increased by rotating the different working teeth. The motor operates with two in-plane third-order bending modes that are orthogonal to each other at the same frequency. The dynamic design and simulation of the vibrator was carried out using ANSYS finite element software, the effect of the structure parameter on the mode is analyzed. A prototype is fabricated and the vibration characteristics and output performance are tested. The experimental results show that the motor runs smoothly at the excitation voltage peak-to-peak value of 240 V, excitation frequency of 30.459 kHz and the pre-pressure of 0.6 N, with the maximum output force of 90 mN and motor no-load speed of 102 mm/s.

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    YANG Jinbo, HE Qing. Research on an In-Plane Bending Mode Traveling Wave Linear Ultrasonic Motor[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 976

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    Paper Information

    Received: Feb. 28, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.06.029

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