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Chinese Journal of Lasers, Volume. 29, Issue s1, 500(2002)

Study on Optical Thin Film Deposition Monitoring Method

YANG Ming-hong1, LIU Jin-song1, and CHEN Qing-ming2
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  • 1[in Chinese]
  • 2[in Chinese]
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    A new method of turn-point-value monitoring is provided in this paper. Deposition is stopped at a point which is senstative to film depth variation by designing and modulating monitoring wavelength. This method can be used to improve deposition monitoring accuracy.

    Keywords
    monitoring accuracythin film depositionturn point value
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    YANG Ming-hong, LIU Jin-song, CHEN Qing-ming. Study on Optical Thin Film Deposition Monitoring Method[J]. Chinese Journal of Lasers, 2002, 29(s1): 500

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    Paper Information

    Category: laser devices and laser physics

    Received: --

    Accepted: --

    Published Online: Feb. 23, 2013

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology