Chinese Journal of Liquid Crystals and Displays, Volume. 35, Issue 10, 1087(2020)

VOCs emission characteristics and treatment effect of TFT-LCD manufacturing industry

GAO Qi, MA Jian, HU Ji-guo, SHENG Shou-xiang, CHEN Chen, and FENG Jun-ting
Author Affiliations
  • [in Chinese]
  • show less

    In order to grasp and understand the Volatile Organic Compounds(VOCs)emission characteristics of various process links in the production process of the TFT-LCD industry, a domestic TFT-LCD manufacturing company was selected as an example to study the VOCs concentration distribution of each production workshop. The results showed that the average concentration of VOCs in the Array production workshop was 4.14~11.19×10-6 in a whole year. The photoresist composition in the CF production workshop was more complex, and the average VOCs concentration of green production line was the highest, which was 4.6~14.50×10-6 in a whole year. The highest VOCs concentration was found at VCD of Array and CF workshop .The key to reduce the concentration of VOCs in the TFT-LCD production workshop lies in source control. Adding zeolite rotor adsorption equipment had a significant effect on reducing the concentration of VOCs in the production workshop, and could remove about 60.71%~71.33% of organic waste gas.

    Tools

    Get Citation

    Copy Citation Text

    GAO Qi, MA Jian, HU Ji-guo, SHENG Shou-xiang, CHEN Chen, FENG Jun-ting. VOCs emission characteristics and treatment effect of TFT-LCD manufacturing industry[J]. Chinese Journal of Liquid Crystals and Displays, 2020, 35(10): 1087

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 29, 2020

    Accepted: --

    Published Online: Jan. 22, 2021

    The Author Email:

    DOI:10.37188/yjyxs20203510.1087

    Topics