Chinese Journal of Lasers, Volume. 44, Issue 3, 304003(2017)
CMM Spatial Coordinate Correction Method Based on Laser Tracer Multistation Measurement
Coordinate measuring machine (CMM) is a high efficiency precision measurement system for coordinate measurement technology. As the development of ultra-precision machining technology, the requirement of the measuring precision of CMM is getting higher and higher. Considering the weak rigid body state of CMM in the process of measurement, this paper proposes a CMM spatial coordinate correction method based on multistation measurement of laser tracer. Firstly, the laser tracer multistation measurement system is set up. Then, the coordinate of measuring point of CMM is corrected by using the high precision interference length of the laser tracer. Finally, the measuring spatial coordinate of CMM is corrected by using the trilinear interpolation method. The simulation experimental results show that the average of the standard deviation of the standard sphere diameter obtained by proposed spatial coordinate correction method is 0.098 μm, which is smaller than 0.118 μm, the average of the standard deviation directly measured by CMM. The results verify that the proposed method can effectively improve the spatial coordinate accuracy of CMM.
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Chen Hongfang, Zheng Bowen, Shi Zhaoyao, Sun Yanqiang, Long Changyu, Yang Zaihua. CMM Spatial Coordinate Correction Method Based on Laser Tracer Multistation Measurement[J]. Chinese Journal of Lasers, 2017, 44(3): 304003
Category: Measurement and metrology
Received: Oct. 10, 2016
Accepted: --
Published Online: Mar. 8, 2017
The Author Email: Hongfang Chen (hfchen@bjut.edu.cn)