Expert System for Thin Film Prepared by Pulsed Laser Deposition

ZHANG Li; JIANG Yi-jian

Chinese Journal of Lasers, Volume. 29, Issue s1, 481(2002)

ZHANG Li and JIANG Yi-jian

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[in Chinese]

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In this paper, the function, structure and principle of the expert system for pulsed laser deposition are introduced. The design thought of the expert system is presented. The condition, application and further development of the expert system are also discussed.

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expert system pulsed laser deposition thin film

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ZHANG Li, JIANG Yi-jian. Expert System for Thin Film Prepared by Pulsed Laser Deposition[J]. Chinese Journal of Lasers, 2002, 29(s1): 481

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