Piezoelectrics & Acoustooptics, Volume. 45, Issue 6, 917(2023)
Experimental Analysis of Rotary Positioning Platform Driven by Single Piezoelectric Ceramic
In order to achieve precise micro and nano-level rotation, a pure rotational micro-positioning platform driven by a single piezoelectric ceramic was designed based on a flexure hinge. The platform utilizes circular array flexible beams to realize motion guidance and decoupling, and increases the rotation range of the moving platform through a lever mechanism. Firstly, the restraining effect of the circular array flexible beam on the axial drift of the moving platform is verified through finite element simulation. Subsequently, the experiment is conducted to examine and analyze the motion characteristics of the flexible beam. The test results indicate that the mechanism exhibits good rotational accuracy, the axis drift is 0-0.23 μm in the positive direction of x axis and 0-4.59 μm in the negative direction of y axis, the rotation radian is up to 916 μrad, and the rotation accuracy is 0.53 μrad. The overall error after compensating for axial drift is 4.9% at most.
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MA Pengfei, CUI Liangyu, ZHONG Junjie, HAN Jianxin. Experimental Analysis of Rotary Positioning Platform Driven by Single Piezoelectric Ceramic[J]. Piezoelectrics & Acoustooptics, 2023, 45(6): 917
Received: Aug. 30, 2023
Accepted: --
Published Online: Jan. 4, 2024
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