Chinese Journal of Lasers, Volume. 31, Issue 7, 861(2004)

Effect of Phase Shifter′s Sub-Processional Motion on Interferometry

[in Chinese]1,2、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]1
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  • 1[in Chinese]
  • 2[in Chinese]
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    In modern digital phase-shifting interferometry (PSI), the phase-shifting error of piezoelectric transducer (PZT) optical phase shifter, which is the basic device of phase-shifting interferometer, directly effects measurement accuracy during wavefront phase unwrapping with phase-shifting interferograms. A phenomenon named sub-processional motion that can result in fringes′ rotation in the processing of phase shift is described. This phenomenon is derived from the normal-line rotation of standard reference surface revolving around the elongate direction of PZT phase shifter. In terms of the classic phase-shifting algorithm-Hariharan 5-Bucket algorithm, the error formula of phase unwrapping is given due to sub-processional motion, and the error distribution on aperture is also derived. Based on error factor analysis, criterions to control the error are presented at such aspects

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Effect of Phase Shifter′s Sub-Processional Motion on Interferometry[J]. Chinese Journal of Lasers, 2004, 31(7): 861

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    Paper Information

    Category: measurement and metrology

    Received: Mar. 28, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (wudong1000@yahoo.com.cn)

    DOI:

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