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Acta Optica Sinica, Volume. 15, Issue 4, 480(1995)

High Accuracy and Large Aperture Optical Standard ──Phase Shifting Digital Flat Interferometer

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]2
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. High Accuracy and Large Aperture Optical Standard ──Phase Shifting Digital Flat Interferometer[J]. Acta Optica Sinica, 1995, 15(4): 480

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 16, 1993

    Accepted: --

    Published Online: Aug. 17, 2007

    The Author Email:

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology