A three-dimensional reconstruction method based on micro-electro mechnical system structure light is proposed. This method uses micro-electro mechnical system structure light to acquire image data, and object 3D reconstruction according to the multi frequency heterodyne method. The acquired three-dimensional data are matched and located with the reference model by point pair feature matching. The three-dimensional coordinates and normal information of arbitrarily placed objects in the robot coordinate system are obtained. The experimental results show that the method based on micro-electro mechnical system structure light achieves the reconstruction accuracy of about 0.1 mm and the processing time is about 0.4 s, which can meet the requirement of positioning and grasping of most industrial robot bin-picking.