Photoelectric glass substrate is one of the most basic photoelectric display material. If there are surface particles, surface stain and surface particle aggregation in the photoelectric glass substrate, they will cause the panel film to peel off or disconnect, and display problems such as dark spots and bright spots, which will affect the display quality and yield. With the development of high definition displays, the requirements for the ability of photoelectric glass substrate cleaning should be improved urgently. By analyzing the cleaning equipment unit structure and improving cleaning methods, the present cleaning method of photoelectric display glass substrate was optimized. These reduce the adverse event rate of product in the customer and improve the displays’ proformance.