With the rapid development of microelectromechanical systems（MEMS）technology，small，lightweight，and mass-produced inertial devices have been achieved. In this context，array technology has emerged to achieve high-precision inertial measurements at low costs. This article provides an overview of the development of MEMS inertial measurement unit（IMU）array technology. First，by analyzing the research results over the years，the development process of IMU arrays is summarized. Second，the key technologies and development status of IMU arrays are introduced，including error analysis modeling and calibration，data fusion，fault detection，and isolation technologies. Finally，the characteristics and limitations of previous research results are summarized，future research directions are discussed，and some ideas for further improving the accuracy of IMU arrays are proposed. These provide a reference for the research and engineering practice of IMU array technology in the field of high-precision navigation.