Journal of Infrared and Millimeter Waves, Volume. 43, Issue 5, 621(2024)
Cavity-type metasurface uncooled infrared detector
As the cell size of uncooled infrared (IR) detectors progressively shrinks, it becomes increasingly important to increase detector absorption. here, an IMIAM (Insulator-Metal-Insulator-Air-Metal) cavity type metasurface uncooled IR detector structure is proposed, which effectively improves the uniformity of the photosensitive layer while enhancing the absorption of the detector. Utilizing systematic simulation and optimization, it has achieved almost perfect absorption in the Long Wavelength Infrared range (8~14 μm), meanwhile, it also shows excellent absorption performance in Mid Wavelength Infrared band. In this paper, the reliability of the structure is also verified by the process. this research may provide alternatives for optimizing conventional uncooled IR detectors
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Jun YANG, Chun-Li YANG, Hui FANG, Jun YUAN, Shan-Ru YAN, Hua-Ying LI, Bing-Zhe LI. Cavity-type metasurface uncooled infrared detector[J]. Journal of Infrared and Millimeter Waves, 2024, 43(5): 621
Category: Infrared Materials and Devices
Received: Jan. 29, 2024
Accepted: --
Published Online: Dec. 2, 2024
The Author Email: Chun-Li YANG (149578363@qq.com)