248 nm discharge-pumped KrF excimer laser is importantly used in microelectronics and medicine. For most applications, maximal output efficiency and energy are very important parameters of a laser. A KrF excimer laser with high efficiency is developed. For obtaining the maximal output efficiency and energy and achieving the stationary discharge of the KrF excimer laser, a new switching power supply, compact electrodes the optimization of storage/discharge capacity, and gas mixture are used to develop a small-type high-efficency discharge-pumped KrF excimer laser. The effect of switching power supply on the charge/discharge characteristic and the effect of gas mixture on the output efficiency and energy of the laser are studied. Compared with the previous product, the property of the laser is improved considerably. The repetition rate of the laser is 1~80 Hz, the maximal efficiency is about 2.5% and the maximal output energy is up to 380 mJ. The pulse to pulse stability is about 1.8% with discharge voltage above 25 kV.