Chinese Journal of Lasers, Volume. 38, Issue 7, 708002(2011)
Application of the Optical Fiber Prober in Measuring Micro Deep Hole of Small Laser
For the role with a diameter of less than 1 mm, a depth more than 10 mm, and a larger ratio of length and diameter, it is difficult to measure these micro deep holes with traditional method. In order to solve this problem, a measurement that combines the contacting measurement and the optics measurement is introduced. By inserting and optical fiber probe with a lighting ball in its end into the role, the ball is pushed with the contraction between the ball and the hole during the xy movement of the piece. The xy coordinate of the ball can be gotten after processing the image of the lighting ball which is captured by the CCD camera. With a fitting of many measure points, the measurements of the diameter, the cylindricity and the straightness etc. of the hole are finally realized. The measurement precision is improved through using sub-pixel detection technology. At last the system is verified through zero degree standard circle, and the repeatability uncertainty of measurement result is less than 0.4 μm. A hole with a depth of a hole with 15 mm and a diameter of about 0.6 mm is measured in a 3D measurement microscope, and the experiment provides a suitable method to measure the hole with big ratio of length and diameter.
Get Citation
Copy Citation Text
Liu Jianping, Liang Liping, Huang Yun, Jin Shilong. Application of the Optical Fiber Prober in Measuring Micro Deep Hole of Small Laser[J]. Chinese Journal of Lasers, 2011, 38(7): 708002
Category: measurement and metrology
Received: Feb. 15, 2011
Accepted: --
Published Online: Jun. 14, 2011
The Author Email: Jianping Liu (l_jianp@sina.com)