Chinese Journal of Lasers, Volume. 19, Issue 9, 663(1992)

Transferring image to GaAs in excimer laser induced aqueous etching

[in Chinese], [in Chinese], and [in Chinese]
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    This paper reports a technique combinaing the eseimer laser induced aqueoug etching and the photolithography to realize image transfer. In the system consisting of gold film, aqua and G-aAs, the gold film not only acts as photomask, but also gives an impulse to etching. Our results suggest that the system is an electro-chemical photocell.

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    [in Chinese], [in Chinese], [in Chinese]. Transferring image to GaAs in excimer laser induced aqueous etching[J]. Chinese Journal of Lasers, 1992, 19(9): 663

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    Paper Information

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    Received: Nov. 7, 1990

    Accepted: --

    Published Online: Sep. 11, 2007

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