Chinese Journal of Lasers, Volume. 19, Issue 9, 663(1992)
Transferring image to GaAs in excimer laser induced aqueous etching
This paper reports a technique combinaing the eseimer laser induced aqueoug etching and the photolithography to realize image transfer. In the system consisting of gold film, aqua and G-aAs, the gold film not only acts as photomask, but also gives an impulse to etching. Our results suggest that the system is an electro-chemical photocell.
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[in Chinese], [in Chinese], [in Chinese]. Transferring image to GaAs in excimer laser induced aqueous etching[J]. Chinese Journal of Lasers, 1992, 19(9): 663