Chinese Journal of Lasers, Volume. 33, Issue suppl, 336(2006)

Diamond-Like Carbon Thin Films Deposited by kHz Femtosecond Pulsed Laser

[in Chinese]1, [in Chinese]1、*, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    Diamond-like carbon (DLC) thin films have been deposited with kHz femtosecond pulsed laser in different temperatures and the optical, mechanical and physicochemical properties of the deposited DLC are evaluated. The laser used in the experiment is a Ti:sapphire laser with the pulse width of 50 fs, wavelength of 800 nm, single pulse energy of 0.5~1.5 mJ and repetition rate of 1kHz. DLC on different substrates, such as quarts, optical K9 glass, is deposited with the focused laser beam ablating the graphite target with the purity of 99.999% at laser pulse energy between 0.5 mJ and 1.5 mJ. Raman spectrum indicates that the DLC have a structure of D band and G band located at 1346 cm-1 and 1574 cm-1, respectively. The infrared transmission of the DLC thin film on the quartz is more than 87% between 1075 nm and 2700 nm with the highest transmission of 90% around 2000 nm, and the apparent transmission-enhanced performance is observed. After dipped into the 10% vitriol for several days and wiped with absorbent cotton, no damage and scratch are found on the DLC thin films.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Diamond-Like Carbon Thin Films Deposited by kHz Femtosecond Pulsed Laser[J]. Chinese Journal of Lasers, 2006, 33(suppl): 336

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    Paper Information

    Category: materials and thin films

    Received: --

    Accepted: --

    Published Online: Apr. 21, 2006

    The Author Email: (xyuan@mail.hust.edu.cn)

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